ハニカムモノリス
Honeycomb Monolith Honeycomb Monolith, Reducingthecost of VOC control in the semiconductor industry. Theregenerativethermaloxidizer(RTO)is one of the standard pieces of equipment used to control theemissionofvolatileorganic compounds(VOCs) inthesemiconductorindustry.In normal operation, anRTOremovesVOCsusinggas-phase free-radicalreactionsofhomogeneousoxidationtoCO2 andwaterat1450ºFto1600ºF.Honeycomb Monolith An RTO uses a regenerative heat exchangeintwoormorepackedbedsoperated with periodic flow reversals. The beds,filledwithaninert ceramic media, areconnectedbyacombustionchamberwhereone or more fuel burnersareinstalledforsystemstartup, and to maintain necessarytemperatureatlowconcentrationsof VOCs.The TheVOC-laden air enters theoxidizeratlowtemperature andisheatedthrough the heat exchangerwiththeinletceramic beds. This airstream then reacts inthecombustionchamberand returnsheattothe outlet beds, where it is absorbed for the next cycle. Uponflowreversal, the bedfunctionschange suchthatasubstantialfractionof energy from VOCcombustionandburnerfiringisregenerated in the upper fraction of the beds.Amplesurfaceareaofceramicmaterial results in highthermalefficiencyachievingupto95percent in…